Specialty electronic gases are an important branch of electronic gases and serve as indispensable raw materials in the production of integrated circuits, display panels, and other electronic products. With a wide variety of types, specialty electronic gases are extensively used in processes such as ion implantation, etching, vapor deposition, and doping. They are often referred to as the “staple” and “source” of materials for integrated circuits, LCD panels, LEDs, and photovoltaics, and play a decisive role in determining the final yield and reliability of electronic devices.
Nitrous oxide (N₂O), as an electronic gas, is primarily used in the dielectric film processes for the research, development, and production of semiconductor optoelectronic devices. It is an irreplaceable key gas that directly impacts the quality of optoelectronic devices. According to the analysis report, high-purity nitrous oxide is a critical raw material for depositing SiO₂ films, as well as for mask layers, passivation layers, and anti-reflective coatings in PECVD processes. The purity of N₂O directly affects the purity of the SiO₂ film. If the impurity content is high, the deposited SiO₂ film will contain numerous particles, lack luster, and exhibit uneven surface refractive indices—all of which hinder the lithography process. If the N₂O contains high levels of trace moisture, it can result in high hydrogen content in the SiO₂ film, causing the film density to fall short of requirements. This leads to unstable device operation and reduced resistance to electromagnetic radiation. Therefore, to ensure the quality and reliability of optoelectronic devices, the purity of nitrous oxide must be 5N (99.999%) or higher, which presents significant technical challenges.
As science and technology advance toward higher levels of sophistication, precision, and cutting-edge innovation, the requirements for the “purity” of various raw materials are becoming increasingly stringent. However, the quantities of high-purity gases available are typically limited. Due to technological constraints, China imports most of its high-purity N₂O from abroad, resulting in a long-standing severe shortage of supply and increasingly significant drawbacks associated with high prices.
Fujian Unite Material Technology Co., Ltd. is a key enterprise designated for development by the provincial, municipal, and county governments of Fujian. Covering a total area of approximately 200 mu and with a project investment of nearly 600 million, it is a new materials company specializing in the R&D, production, repackaging, and sales of high-purity and ultra-high-purity specialty gases. By introducing internationally advanced equipment and technology and adopting the thermal decomposition of ammonium nitrate production process—NH₄NO₃ = N₂O + 2H₂O—the company refines nitrous oxide with a purity as high as 99.9995% through processes including melting, thermal decomposition, purification, compression and liquefaction, drying, and further purification, achieving an annual production capacity of 20,000 metric tons. The company has long been a stable supplier of industrial-grade high-purity nitrous oxide to internationally renowned semiconductor, integrated circuit, LCD, and OLED manufacturers, earning the trust of customers worldwide. 
